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Ehem. Mitarbeiter

Prof. Dr.-Ing. Martin Hoffmann

Anschrift

Technische Universität Dortmund
Lehrstuhl für Hochfrequenztechnik
Prof. Dr.-Ing. Martin Hoffmann
Friedrich-Wöhler-Weg 4
D-44227 Dortmund

Kontakt

Telefon: über das Sekretariat
des Lehrstuhls:
+49 (0)231 755 - 2491
mitarbeiter21

Forschungsgebiete / Persönliches

Lebenslauf:

  • 1986 - Januar 1992: Studium der Elektrotechnik an der Universität Dortmund
  • ab März 1992 wissenschaftlicher Angestellter am Lehrstuhl für Hochfrequenztechnik
  • 1996 Promotion:
    'Plasma- abgeschiedene integriert optische Wellenleiter auf Silizium für die faseroptische Kommunikationstechnik'
  • Januar 1997 - März 2003: Oberingenieur
  • Juli 2003 Habilitation: 'Mikrosystemtechnik'
  • April 2003 bis März 2004 bei HL-Planartechnik, Dortmund
  • März 2004 bis Dezember 2005 bei Silicon Manufacturing Itzehoe GmbH, Itzehoe
  • seit Januar 2006 Fachgebietsleiter des Fachgebiets "Mikromechanische Systeme" an der TU Ilmenau, Ilmenau

Publikationen

  • R. Gentemann, D. Teufer, K. Temmen, M. Hoffmann, "3D-fibre channels in silicon by electrical breakdown?New opportunities for optical fibre alignment and microfluidics", AEU - International Journal of Electronics and Communications, vol. 61, no. 3, pp. 172-176, March 2007
  • D. Nüsse, M. Hoffmann, E. Voges, "Megasound enhanced KOH Etching for {110} silicon bulk micromachining", Optomechatronic Sensors, Actuators and Control, Proceedings of SPIE, October 2004, Volume 5602, 27-34
  • D. Nüsse, M. Hoffmann, E. Voges, "Vertically Operating Electrostatic Comb-Drive", Actuator 2004, 9th International Conference on New Actuators, 14-16 June 2004, Bremen, Proceedings (2004), pp. 502-505
  • I. Snigireva, A. Snigirev, V. Yunkin, M. Drakopoulos, M. Grigoriev, S. Kuznetsov, M. Chukalina, M. Hoffmann, D. Nüsse, E. Voges, "X-ray Si-based Integrated Lens System for Wide Range of Hard Synchrotron Radiation", Proc.of 8th Int. Conference on Synchrotron Radiation Instrumentation, 2004, 708-711
  • M. Hoffmann, P. Kopka, D. Nüsse, E. Voges, "Fibre-optical MEMS based on bulk silicon micromachining", Microsystem Technologies 9, S. 299-303, Mai 2003
  • D. Nüsse, M. Hoffmann, E. Voges, "Optisches Element für 1x2 Einmoden-Faserschalter aus anisotrop geätztem Silicium", ITG-Workshop 2003, Wernigerode
  • M. Hoffmann, D. Nüsse, E. Voges, "Optical MEMS devices based on wet anisotropic etching of silicon", ECS 2003, Paris
  • M. Hoffmann, D. Nüsse, E. Voges, "An electrostatically actuated 1x2 moving-fibre switch", IEEE Photonics Technology Letters, vol. 15,no. 1, Jan. 2003,S 39-41
  • I. Snigireva, V. Yunkin, S. Kuznetsov, M. Grigoriev, M. Chukalina, L. Shabel'nikov, A. Snigirev, M. Hoffmann, E. Voges, "Focusing properties of silicon refractive lenses: comparision experimental results with the computer simulation", Proceedings SPIE vol. 5195, (2003), 32-39
  • M. Hoffmann, E. Voges, "Bulk silicon micromachining for MEMS in optical communication systems", (REVIEW), Journal of Micromechanics and Microengineering 12 (2002), 349-360
  • M. Hoffmann, D. Nüsse, E. Voges, "Bulk silicon micromachined electrostatic microactuators for use in optical MEMS", Conference Proceedings: Actuator 2002, Bremen, Tagungsband (2002), S. 304-307
  • M. Hoffmann, D. Nüsse, E. Voges, "Electrostatically actuated moving-fibre switch", Conference Digest IEEE/LEOS Int. Conf. On Opitcal MEMS 2002, S. 111-112
  • L. Dellmann, W. Noell, C. Marxer, K. Weible, M. Hoffmann, N.F. de Rooij, "4×4 matrix switch based on MEMS switches and integrated waveguides", Transducers '01 - Eurosensors XV, München, 1332-1335
  • D. Nüsse, M. Hoffmann and E. Voges, "Electrostatic Parallel-Plate Actuators for Use in Optical Moving-Fibre Switches", Workshop Optical MEMS and Integrated Optics, Dortmund, 2001
  • W. Noell, L. Dellmann, C. Marxer, K. Weible, M. Hoffmann, N.F. de Rooij, "Hybrid 4'4 optical cross connector based on MEMS switches and integrated optical waveguides", IEEE/LEOS Optical MEMS 2001, Okinawa, Japan, 13-14
  • M. Hoffmann, E. Voges, "New silicon-based fibre assemblies for applications in integrated optics and optical MEMS", Applied Physics B Laser and Optics 76 (2001), 629-633
  • V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, C. Rau, A. Snigirev, I. Snigireva, T. Weitkamp, M. Hoffmann, E. Voges, "Silicon planar refractive lenses with the optimised design", Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers, Detectors and Associated Equipment 470 (2001), 131-134
  • I. Snigireva, A. Snigirev, C. Rau, T. Weitkamp, V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, M. Hoffmann, E. Voges, "Holographic X-ray optical elements: transition between refraction and diffraction", Nuclear Instruments & Methods in Physics Research Section A – Acclerators, Spectrometers, Detectors and Associated Equipment 467 (2001), 982-985
  • M. Hoffmann, D. Nüsse, E. Voges, "Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches", Journal of Micromechanics and Microengineering 11 (2001), 323-328
  • M. Hoffmann, E. Voges, "New silicon-based fibre assemblies for integrated optical chip coupling", Proceedings: European Conference on Integrated Optics (ECIO), 2001, 259-262
  • M. Hoffmann, E. Voges, "Rautenförmige Silicium-Faserführungsstrukturen für die Integrierte Optik", Tagungsband zum ITG-Workshop "Optische Aufbau- und Verbindungstechnik", Berlin, 2001
  • M. Hoffmann, P. Kopka, D. Nüsse, E. Voges, "Optical MEMS based on bulk silicon micromachining", Workshop on Optical MEMS and Integrated Optics, Dortmund, 2001, S. 20-1 - 20-5
  • L. Dellmann, W. Noell, C. Marxer, K. Weible, M. Hoffmann, N.F. de Rooij, "4x4 matrix switch based on MEMS switches and integrated waveguides", Transducers '01 Eurosensors XV, München, S. 1332
  • M. Hoffmann, E. Voges, "Bulk silicon micromachining for Optical MEMS", Workshop Digest: Micromechanics Europe 2001, MME '01, Cork, 317-330 (eingeladener Vortrag)
  • M. Hoffmann, D. Nüsse, E. Voges, "Entwurf und Herstellung elektrostatischer Aktoren mit großer Auslenkung in Silicium-Volumenmikromechanik", 5. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, Tagungsband (2001), S. 1-5
  • I. Snigireva, A. Snigirev, S. Kuznetsov, C. Rau, T. Weitcamp, L. Shabelnikov,M. Grigoriev, V. Yunkin, M. Hoffmann, E. Voges, "Refractive and diffractive X-ray optical elements", Proc. SPIE Vol. 4499, pp. 64-73, 2001
  • M. Grigoriev, L. Shabelnikov, V. Yunkin, A. Snigirev, I. Snigireva, M. Di Michiel, S. Kuznetsov, M. Hoffmann, E. Voges, "Planar parabolic lenses for focusing high energy X-rays", Proc. SPIE Vol. 4501, pp. 185-192, 2001
  • V. Aristov, M. Grigoriev, S. Kuznetsov, L. Shabelnikov, V. Yunkin, C. Rau, A. Snigirev, I. Snigireva, T. Weitkamp, M. Hoffmann, E. Voges, "Silicon planar parabolic lenses", Proc. SPIE Vol. 4145, pp. 285-293, 2001
  • M. Hoffmann, S. Dickhut, E. Voges, "Fiber Ribbon Alignment Structures Based on Rhombus-Shaped Channels in Silicon", IEEE Photonics Technol. Lett., 12, no. 7, 2000, 828-830
  • M. Hoffmann, P. Kopka, E. Voges, "Lensless Latching-Type Fiber Switches Using Silicon Micromachined Actuators", 25th Optical Fiber Communication Conference, OFC 2000, Baltimore, Maryland, USA, Technical Digest , Thursday, March 9, 2000, 250-252
  • V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, M. Hoffmann, E. Voges, "X-ray focusing by planar parabolic refractive lenses made of silicon", Optics Communications 177 (2000), 33-38
  • V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, T. Weitkamp, C. Rau, I. Snigireva, A. Snigirev, M. Hoffmann, E. Voges, "X-ray refractive planar lens with minimized absorption", Applied Physics Letters 77 (2000), 4058-4060
  • P. Kopka, M. Hoffmann, and E. Voges, "Coupled U-Shaped Cantilever Actuators for 1x4 and 2x2 Optical Fibre Switches", J. Micromech. Microeng., Special Issue MME'99, 10, 2000, 260-264
  • V.V. Aristov, M.V. Grigoriev, S.M. Kuznetsov, L.G. Shabelnikov, V.A. Yunkin, M. Hoffmann, E. Voges, "X-ray focusing by planar parabolic refractive lenses made of silicon", Optics Communications, 177, 2000, 33-38
  • P. Kopka, M. Hoffmann, E. Voges, "Latching-Type 2x2 and 1x4 Fiber-Optic Switches ", SPIE MOEMS and Miniaturized Systems, Santa Clara, CA, USA, 2000, Proceedings of SPIE, 4178, 44-50
  • M. Hoffmann, P. Kopka, E. Voges, "Bulk Silicon Micromachined Actuators for Large Deflections", MICRO.tec, VDE World Microtechnologies Congress, Sep. 25 - 27, 2000, EXPO 2000, Hannover, Germany, Proceedings Vol. 2, 663-668
  • M. Hoffmann, E. Voges, "Electrostatic Parallel-Plate Actuators with Large Deflections for Use in Optical Moving-Fibre Switches", MME '00, Micromechanics Europe, Oct. 1-3, 2000, Uppsala, Sweden, Workshop Digest, A8
  • V. Aristov, V. Yunkin, M. Grigoriev, S. Kuznetsov, L, Shabelnikov, M. Hoffmann, E. Voges, "Silicon Planar Parabolic Tefractive Lenses for Hard X-Rays", MME '00, Micromechanics Europe, Oct. 1-3, 2000, Uppsala, Sweden, Workshop Digest, B18
  • M. Hoffmann, P. Kopka, and E. Voges, "All-Silicon Bistable Micromechanical Fiber Switch Based on Advanced Bulk Micromachining", IEEE J. Selected Topics in Quantum Electron., Special Issue on MOEMS, 5, no. 1, 1999, 46-51
  • M. Hoffmann, P. Kopka, and E. Voges, "Optical fibre switches based on full wafer silicon micromachining", J. Micromech. Microeng., Special Issue MME '98, 9, 1999, 151-155
  • M. Hoffmann, P. Kopka, and E. Voges, "Bistable Micromechanical Fiber-Optic Switches on Silicon with Thermal Actuators", Sensors & Actuators, Special Issue MEMS '98, A-78, no. 1, 1999, 28-35
  • P. Kopka, M. Hoffmann, E. Voges, "12-Channel Optical Switch Arrays for Protection Switching in Space Division Multiplexed Networks", 9th European Conference on Integrated Optics and Technical Exibition, ECIO'99, Torino, Italy, 1999, Proceedings, 85-88
  • P. Kopka, M. Hoffmann, E. Voges, "Bistable 2x2 and Multistable 1x4 Micromechanical Fibre-optic Switches on Silicon", 3rd International Conference on Micro Opto Electro Mechanical Systems, MOEMS'99, Mainz, 1999, Proceedings, 88-91
  • M. Hoffmann, S. Dickhut, E. Voges, "Silicon Fibre Ribbon Pigtails with Rhombus-Shaped Fibre Channels and Integrated Photodiodes", 3rd International Conference on Micro Opto Electro Mechanical Systems, MOEMS'99, Mainz, 1999, Proceedings, 206-209
  • P. Kopka, M. Hoffmann, E. Voges, "Coupled U-shaped cantilever actuators for 1x4 and 1x2 optical fibre switches", Micromechanics Europe conference, MME '99, Gif-sur-Yvette, France, 1999, Proceedings, 231-234
  • M. Hoffmann, P. Kopka, and E. Voges, "Thermo-optical digital switch arrays in silica-on-silicon with defined zero voltage state", IEEE J. Lightwave Technol. 16, no. 3, 1998, 395-400
  • M. Hoffmann, P. Kopka, T. Gross, and E. Voges, "All-silicon bistable micromechanical fibre switch", Electron. Letters 34, no. 2, 1998, 207-208
  • M. Hoffmann, P. Kopka, T. Gross, and E. Voges, "Bistable Si-Micromachined Fibre Switches", IPR '98 conference, Technical Digest, Victoria, Canada, 1998, Technical Digest, 342-344
  • M. Hoffmann, P. Kopka, and E. Voges, "Optical fibre switches based on full wafer silicon micromachining", Micromechanics Europe conference, MME '98, Ulvik, Norway, 1998, Proceedings, 96-99
  • M. Hoffmann, P. Kopka, and E. Voges, "Bistable Micromechanical Fiber-Optic Switches on Silicon", IEEE/LEOS Summer Topical Meeting on Optical MEMS, Monterey, USA, 1998, Digest, 31-32
  • M. Hoffmann, P. Kopka, and E. Voges, "Micromechanical Fiber Switch Array on Silicon", 24th European Conference on Optical Communication, ECOC '98, Madrid, 1998, Proc., 1, 39-40
  • M. Hoffmann, P. Kopka, and E. Voges, "Low-loss fiber-matched low-temperature PECVD waveguides with small core dimensions for optical communication systems", Photonics Technology Letters 9, no. 9, 1997, 1238-1240
  • M. Hoffmann, "Plasmaabgeschiedene integriert optische Wellenleiter auf Silizium für die faseroptische Kommunikationstechnik", Fortschritt-Berichte VDI, Reihe 10: Informatik / Kommunikationstechnik, VDI-Verlag, Düsseldorf 1997
  • M. Hoffmann, P. Kopka, and E. Voges, "Thermo-optical digital switch arrays in silica-on-silicon for SDM ring networks", Photonics in Switching 1997, OSA Technical Digest Series 10, 1997, paper JFA7, 174-177
  • M. Hoffmann, P. Kopka, and E. Voges, "Thermo-optical digital switch arrays in silica-on-silicon for SDM ring networks", 8th European Conference on Integrated Optics, ECIO'97, Stockholm, 1997, Proceedings, 486-489
  • M. Hoffmann and E. Voges, "Planare Optik und Mikromechanik auf Silizium", UniReport der Universität Dortmund, Heft 23, 1996 , 3-5
  • E. Voges and M. Hoffmann, "Optical waveguides on silicon combined with micromechanical structures", IEEE/LEOS Summer Topical Meetings: Optical MEMS and their applications, 1996, 69-70
  • M. Hoffmann and E. Voges, "Thermo-Optical Digital Switches on Silicon", European Conference on Integrated Optics, ECIO'95, Delft, Netherlands, 1995, 403-406
  • M. Hoffmann and E. Voges, "Silica Waveguide Devices on Silicon fabricated by PECVD / RIE", Technical Digest: 10th International Conference on Integrated Optics and Optical Fibre Communication IOOC '95, Hong Kong, 1995, 3, 34/35
  • M. Hoffmann, H. Bezzaoui, and E. Voges, "Micromechanical Cantilever Resonators with Integrated Optical Interrogation", Sensors & Actuators A 44, 1994, 71-75
  • M. Hoffmann and E. Voges, "A Comparison of Nitrogen- and Silicon-Doped Low Loss Silica Waveguides Using Plasma Enhanced Chemical Vapor Deposition", 6. Bundesdeutsche Fachtagung Plasmatechnologie, Wuppertal, 1994, PT-P36
  • E. Voges, H. Bezzaoui, and M. Hoffmann, "Integrated Optics and Microstructures on Silicon", Proceedings European Conference on Integrated Optics, ECIO'93, Neuchatel, Schweiz, 1993, 12/4-12/6
  • H. Bezzaoui, M. Hoffmann, and E. Voges, "Micromechanical devices on silicon with integrated optical read-out", Micro System Technologies'92, Springer Verlag Berlin 1992 (Hrsg. Reichl), 243-251